Share Email Print

Proceedings Paper

Ludman Parallelism Interferometer
Author(s): Benoit P. Bullier
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A new Interferometer is described which is capable of measuring the parallelism and flatness of two faces of the same object. The use of this Interferometer is described and the results of measurements are given.

Paper Details

Date Published: 26 October 1983
PDF: 6 pages
Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); doi: 10.1117/12.935227
Show Author Affiliations
Benoit P. Bullier, ORIEL Sari (France)

Published in SPIE Proceedings Vol. 0396:
Advances in Laser Scanning and Recording
Leo Beiser, Editor(s)

© SPIE. Terms of Use
Back to Top