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Proceedings Paper

Advances In Submicron Positioning
Author(s): Karl Spanner; Harry Marth
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Paper Abstract

Piezoelectric Translators convert the electrical energy directly to a mechanical movement. That is the reason why piezoelectric translators have a lot of advantages if used as positioners in applications with demands of high accuracy and resolution. Possibilities and realization of new developed and optimized piezo translators for long expansion or high forces have been taken into consideration.

Paper Details

Date Published: 26 October 1983
PDF: 6 pages
Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); doi: 10.1117/12.935225
Show Author Affiliations
Karl Spanner, Physik Instrumente (PI) GmbH & Co. (W. Germany)
Harry Marth, Physik Instrumente (PI) GmbH & Co. (W. Germany)

Published in SPIE Proceedings Vol. 0396:
Advances in Laser Scanning and Recording
Leo Beiser, Editor(s)

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