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Proceedings Paper

Compact Air Bearing Beam Scanner: Production And Test
Author(s): Peter Langenbeck
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Paper Abstract

Metrology and production aspects of a precision polygon mirror bea, deflector are discussed. The Intop-Watt air bearing spindle integrates a polygon mirror wheel into a scanner drive unit of utmost compactness, without mechanical overconstraints. This unit is the ideal combination polygon/drive for applications requiring the accuracy provided by air bearing spindles. Accuracy verification for all essential functional surfaces is described based on "all-over" interferometry.

Paper Details

Date Published: 26 October 1983
PDF: 7 pages
Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); doi: 10.1117/12.935224
Show Author Affiliations
Peter Langenbeck, Protop GmbH (West Germany)


Published in SPIE Proceedings Vol. 0396:
Advances in Laser Scanning and Recording
Leo Beiser, Editor(s)

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