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Proceedings Paper

A Meander Channel CCD Infrared Imager With A Platinum Silicide Schottky Barrier
Author(s): Yuichiro Ito; Akira Shimohashi; Toshiro Yamamoto; Kunihiro Tanikawa
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Paper Abstract

This paper describes a new configuration for a Schottky barrier IRCCD (SB-IRCCD). This device utilizes a Meander Channel CCD (MCCD) for both the vertical and horizontal readout registers. The MCCD has simple electrode configuration consisting of two straight gate electrodes over the meander channel without bus lines and contact holes. This simple electrode configuration increases the fill factor of SB-IRCCD and results in the improvement of its photoresponse. In addition, the versatile electrode configuration of the MCCD simplifies connection (in corner turns) between the vertical and horizontal readout registers. A 64 x 64-element monolithic Schottky barrier infrared meander channel CCD (SB-IRMCCD) with a 23 % fill factor was fabricated with a relaxed 10 μm design rule. This paper also discuss how a fill factor of 57 % will be possible by decreasing the area of the vertical MCCD register to 30 % of the present device.

Paper Details

Date Published: 30 November 1983
PDF: 7 pages
Proc. SPIE 0395, Advanced Infrared Sensor Technology, (30 November 1983); doi: 10.1117/12.935181
Show Author Affiliations
Yuichiro Ito, Fujitsu Laboratories Ltd. (Japan)
Akira Shimohashi, Fujitsu Laboratories Ltd. (Japan)
Toshiro Yamamoto, Fujitsu Laboratories Ltd. (Japan)
Kunihiro Tanikawa, Fujitsu Laboratories Ltd. (Japan)

Published in SPIE Proceedings Vol. 0395:
Advanced Infrared Sensor Technology
Jean Besson, Editor(s)

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