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Proceedings Paper

Studies Of Fabrication Parameters Of Textured Storage Media
Author(s): L, M. Schiavone; H. G. Craighead; R. E. Howard; J. L. Shay
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Paper Abstract

This paper describes the changes in morphology of microscopically textured germanium as a function of the fabrication parameters. A technique of sputtering aluminum from the upper electrode to provide uniform mask formation over the surface is described. This process allows fabrication of much larger area textured surfaces than was possible using previous techniques.

Paper Details

Date Published: 20 September 1982
PDF: 5 pages
Proc. SPIE 0390, High Speed Read/Write Techniques for Advanced Printing and Data Handling, (20 September 1982); doi: 10.1117/12.935054
Show Author Affiliations
L, M. Schiavone, Bell Laboratories (United States)
H. G. Craighead, Bell Laboratories (United States)
R. E. Howard, Bell Laboratories (United States)
J. L. Shay, Bell Laboratories (United States)


Published in SPIE Proceedings Vol. 0390:
High Speed Read/Write Techniques for Advanced Printing and Data Handling
Leo Beiser, Editor(s)

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