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Proceedings Paper

Layer Generation For Devices And Integrated Circuits
Author(s): Derek L. Lile
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Paper Abstract

Solid-state electronics is based on devices constructed from sequentially deposited layers of semiconductors, metals and insulators. This paper discusses some of the performance limiting parameters of such structures with particular attention being given to their surface and interfacial properties.

Paper Details

Date Published: 8 November 1983
PDF: 5 pages
Proc. SPIE 0387, Technology of Stratified Media, (8 November 1983); doi: 10.1117/12.934976
Show Author Affiliations
Derek L. Lile, Naval Ocean Systems Center (United States)

Published in SPIE Proceedings Vol. 0387:
Technology of Stratified Media
Roy F. Potter, Editor(s)

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