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Proceedings Paper

Precision Laser Irradiation System
Author(s): Eugene G. Arthurs; Kuo-Ching Liu
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Paper Abstract

Current and projected applications of laser micromachining in the semiconductor industry are discussed. A precision laser irradiation system designed for applications in the production of very large scale integrated circuits is described. The equipment incorporates a frequency doubled neodymium in YAG laser, high numerical aperture optics and a precision XY stage. The laser is engineered to produce short pulses reliably in order to simplify control of laser induced thermal effects. Several examples of application of the equipment are described.

Paper Details

Date Published: 9 August 1983
PDF: 10 pages
Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); doi: 10.1117/12.934962
Show Author Affiliations
Eugene G. Arthurs, Quantronix Corporation (United States)
Kuo-Ching Liu, Quantronix Corporation (United States)


Published in SPIE Proceedings Vol. 0385:
Laser Processing of Semiconductor Devices
Charles C. Tang, Editor(s)

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