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Proceedings Paper

Laser Targeting Considerations In Redundant Memory Repair
Author(s): D. Smart; R. Reilly; B. Wells
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Paper Abstract

Selection of alignment targets for memory redundancy repair is a design step that critically affects the yield of the device repair process. Assuming accurate laser beam positioning and energy density control, the ability of the system to reliably identify a reference on each die will result in a high fix-to-attempt ratio on repairable memories.

Paper Details

Date Published: 9 August 1983
PDF: 5 pages
Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); doi: 10.1117/12.934961
Show Author Affiliations
D. Smart, Teradyne, Inc. (United States)
R. Reilly, Teradyne, Inc. (United States)
B. Wells, Teradyne, Inc. (United States)


Published in SPIE Proceedings Vol. 0385:
Laser Processing of Semiconductor Devices
Charles C. Tang, Editor(s)

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