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Proceedings Paper

Laser Redundancy: Past, Present, And Future
Author(s): Edward J. Swenson
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Paper Abstract

The evolution of laser implemented redundancy, or simply "laser redundancy", as a production process used to improve semiconductor manufacturing yields, is described. Increasingly demanding process requirements and associated implications for laser equipment are identified. Finally, laser redundancy appears to be just the first of many applications where the laser will be used to modify semiconductor circuits.

Paper Details

Date Published: 9 August 1983
PDF: 4 pages
Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); doi: 10.1117/12.934960
Show Author Affiliations
Edward J. Swenson, Electro Scientific Industries, Inc. (United States)


Published in SPIE Proceedings Vol. 0385:
Laser Processing of Semiconductor Devices
Charles C. Tang, Editor(s)

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