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Proceedings Paper

Laser Microsurgery And Fabrication Of Integrated Circuits
Author(s): J. R. Moulic; Y. C. Kiang; R. W. Lang; J. C. Logue
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Paper Abstract

The complexity of integrated circuits has progressed from a single logic function on a chip consisting of a few dozen transistors to a complete, single chip 32-bit microprocessor of 100,000 transistors. This growth has created a challenge for the product designer--to utilize the increased functional capacity available with VLSI, while still developing designs rapidly and at a reasonable cost.

Paper Details

Date Published: 9 August 1983
PDF: 6 pages
Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); doi: 10.1117/12.934959
Show Author Affiliations
J. R. Moulic, International Business Machines Corporation (United States)
Y. C. Kiang, International Business Machines Corporation (United States)
R. W. Lang, International Business Machines Corporation (United States)
J. C. Logue, International Business Machines Corporation (United States)


Published in SPIE Proceedings Vol. 0385:
Laser Processing of Semiconductor Devices
Charles C. Tang, Editor(s)

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