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Proceedings Paper

Characterization Of Laser Blown Molydisilicide Links
Author(s): Scott Wills; Joe McPherson
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Paper Abstract

The laser blowing of MoSi2/Poly-n + fuse links is reported. The polycide links were successfully blown under 10K Å of PSG (phospho silicate glass used for isolation between the link and the aluminum) at laser power levels comparable to those used for standard poly link vaporization. Also, the size of the crater in the PSG, produced by the expanding gases associated with link vaporization, was found to be less than that for standard poly links. Laser power levels were found which gave both a near unity blowing probability and produced no substrate damage when the link was located on top of 7-10K Å of field oxide. The successful blowing of silicide links is very important with respect to the use of both laser redundancy and silicides in VLSI technology.

Paper Details

Date Published: 9 August 1983
PDF: 5 pages
Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); doi: 10.1117/12.934958
Show Author Affiliations
Scott Wills, Texas Instruments Incorporated (United States)
Joe McPherson, Texas Instruments Incorporated (United States)

Published in SPIE Proceedings Vol. 0385:
Laser Processing of Semiconductor Devices
Charles C. Tang, Editor(s)

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