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Proceedings Paper

Some New Laser Processing Applications In Microelectronics
Author(s): Donald L. Parker
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Paper Abstract

Currently widespread commercial applications of laser processing in the microelectronics industry is limited to resistor trimming by micromachining, link blowing for the repair of very large memory circuits, mask repair, and wafer labeling. This paper describes several potential applications for laser processing which are being investigated at Texas A&M. The areas are given below with a brief summary of the results.

Paper Details

Date Published: 9 August 1983
PDF: 6 pages
Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); doi: 10.1117/12.934942
Show Author Affiliations
Donald L. Parker, Texas A&M University (United States)

Published in SPIE Proceedings Vol. 0385:
Laser Processing of Semiconductor Devices
Charles C. Tang, Editor(s)

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