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Proceedings Paper

Recent Advances In Laser Processing Of Semiconductors
Author(s): A. Kestenbaum
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Paper Abstract

Over the years laser applications to semiconductor device processing have evolved along distinct lines. Those involving interactions and effects in the inactive part of the chip came first, while those involved alterations in material in the active part of the chip have attracted more interest recently. In this review paper we highlight examples from each of these categories.

Paper Details

Date Published: 9 August 1983
PDF: 6 pages
Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); doi: 10.1117/12.934935
Show Author Affiliations
A. Kestenbaum, Western Electric Co. (United States)


Published in SPIE Proceedings Vol. 0385:
Laser Processing of Semiconductor Devices
Charles C. Tang, Editor(s)

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