Proceedings PaperAnalysis Of Surface Layers
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Chemical analysis of thin surface layers and analysis of the in-depth profiles of elements with an in-depth resolution of a few nm can be applied to detect production defects of polished optical surfaces and allow to select means in the production to avoid them. Especially Secondary Ion Mass Spectrometry can be applied successfully in investigating optical surfaces because it allows the detection of all elements. It is demonstrated with SIMS results, that differences in the spectral reflectance e.g. caused by stains due to the treatment of optical surface can be correlated with differences in the in-depth profiles of elements in a thin surface layer of the glass. Complementary investigations of production defects are required to support the results using several methods especially microscopy, electron microscopy and electron diffraction. Solid state reactions at the interfaces between the glass, the glass surface layer and the coating also can contribute to the differences in the reflectance in the stained areas. The chemical aspects of the composition changes induced within glass surface layers and coatings occurring during processing of the surface and coating are discussed.