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Proceedings Paper

Automatic Inspection Of Fine Lines
Author(s): David Paterson
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Paper Abstract

This paper discusses some of the problems current in the automatic inspection of objects containing repetitive features such as are typically found in a research environment within the electronics industry. The range of features dealt with includes fine lines, complex scenes, and general-purpose edges of the type encountered in everyday high-precision metrology as viewed through a computer-driven coordinate measuring microscope.

Paper Details

Date Published: 10 August 1983
PDF: 5 pages
Proc. SPIE 0376, Optical Sensing: Techniques, Benefits, Costs, (10 August 1983); doi: 10.1117/12.934731
Show Author Affiliations
David Paterson, Philips Research Laboratories (England)


Published in SPIE Proceedings Vol. 0376:
Optical Sensing: Techniques, Benefits, Costs
S. J. Bennett, Editor(s)

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