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Proceedings Paper

Applications Of Scanning Optical Microscopy
Author(s): Colin J.R. Sheppard
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Paper Abstract

The scanning optical microscope (SOM) provides new information concerning a wide range of specimens. It is particularly advantageous for study of materials and devices, including semiconductors. The image is built up on a TV-type display by mechanically scanning the object across a focussed laser spot.

Paper Details

Date Published: 29 March 1983
PDF: 8 pages
Proc. SPIE 0368, Microscopy: Techniques and Capabilities, (29 March 1983); doi: 10.1117/12.934331
Show Author Affiliations
Colin J.R. Sheppard, University of Oxford (England)

Published in SPIE Proceedings Vol. 0368:
Microscopy: Techniques and Capabilities
Lionel R. Baker, Editor(s)

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