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Proceedings Paper

Applications Of Acoustic Microscopy In The Semiconductor Industry
Author(s): A. J. Miller
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Paper Abstract

The Quate scanning acoustic microscope has now become established in university research groups, and interest is being shown from industry. The author has constructed a 1 GHz reflection instrument with lateral resolution better than 2 μm, and has been evaluating a number of possible applications. Some of these are discussed in detail and will include: (i) The examination of integrated circuit chips processed in MOS technologies, using the subsurface capability of the instrument. (ii) Metallurgical studies (iii) Thin-film studies, including organic thin films Emphasis will be placed on the merits of acoustic microscopy as opposed to other methods, and further developments of the technique likely to be of use will be discussed.

Paper Details

Date Published: 29 March 1983
PDF: 5 pages
Proc. SPIE 0368, Microscopy: Techniques and Capabilities, (29 March 1983); doi: 10.1117/12.934326
Show Author Affiliations
A. J. Miller, The General Electric Company, p.l.c. (England)


Published in SPIE Proceedings Vol. 0368:
Microscopy: Techniques and Capabilities
Lionel R. Baker, Editor(s)

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