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Proceedings Paper

Technique For Quantitative Analysis Of Specimen Microtopography Using Computer Control Of A Scanning Electron Microscope
Author(s): David M. Holburn
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Paper Abstract

An automated method for quantitative determination of specimen topography is described in which a computer-controlled range finding technique is employed to measure the distance between the objective lens of a scanning electron microscope (SEM) and a set of distinct features on the specimen surface. Computations based on the spatial derivative of the image intensity allow the objective lens setting corresponding to the optimum focus for each feature to be determined, and this can be related to the feature height. Experimental results and theoretical analysis indicate that the sensitivity for discrimination of height differences is of the order of 1μm.

Paper Details

Date Published: 29 March 1983
PDF: 6 pages
Proc. SPIE 0368, Microscopy: Techniques and Capabilities, (29 March 1983); doi: 10.1117/12.934322
Show Author Affiliations
David M. Holburn, University of London (England)


Published in SPIE Proceedings Vol. 0368:
Microscopy: Techniques and Capabilities
Lionel R. Baker, Editor(s)

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