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Proceedings Paper

Techniques In Surface Microscopy And Analysis
Author(s): J. M. Walls
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Paper Abstract

A number of techniques are now available for the characterization of solid surfaces. The scanning electron microscope has firmly established its role in industry and elsewhere for routing high resolution studies of surface structure and topography and the addition of energy dispersive x-ray (EDX) analysis provides the technique with a powerful and comple-mentary method of elemental analysis. More recently, techniques such as the scanning auger microprobe (SAM), x-ray photoelectron spectroscopy (XPS or ESCA), and secondary ion mass spectrometry (SIMS) have become available which combine spatial resolution (of varying utility) with an ability to determine the composition of the outermost atomic layers (with varying precision and sensitivity). The remarkable depth resolution of these methods may also be exploited when used with surface sectioning techniques (such as sputter-etching) to provide composition-depth profiles. This lecture is aimed at introducing the principles and analytical procedures of these techniques and at illustrating their areas of application with examples of coullnercial importance in materials characterization, failure analysis, quality assurance and production problem solving.

Paper Details

Date Published: 29 March 1983
PDF: 1 pages
Proc. SPIE 0368, Microscopy: Techniques and Capabilities, (29 March 1983); doi: 10.1117/12.934320
Show Author Affiliations
J. M. Walls, Loughborough University of Technology (United Kingdom)


Published in SPIE Proceedings Vol. 0368:
Microscopy: Techniques and Capabilities
Lionel R. Baker, Editor(s)

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