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Proceedings Paper

Description And Limitations Of An Automated Scatterometer
Author(s): William L. Wolfe; Frederick O. Bartell; Lawrence D. Brooks
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Paper Abstract

The methods, capabilities and limitations of a multiwavelength scatterometer are described.

Paper Details

Date Published: 5 April 1983
PDF: 5 pages
Proc. SPIE 0362, Scattering in Optical Materials II, (5 April 1983); doi: 10.1117/12.934149
Show Author Affiliations
William L. Wolfe, University of Arizona (United States)
Frederick O. Bartell, University of Arizona (United States)
Lawrence D. Brooks, Rockwell International (United States)


Published in SPIE Proceedings Vol. 0362:
Scattering in Optical Materials II
Solomon Musikant, Editor(s)

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