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Proceedings Paper

Registration Accuracy In Several Versions Of A Scanning 1:1 Optical Projection System
Author(s): Rene Vervoordeldonk; Peter Willemse; Roel Kramer; Tony Cowburn
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Paper Abstract

The factors influencing registration accuracy in a scanning 1:1 optical projection system are investigated. The overall registration accuracy in several versions of this system is evaluated. Data was gathered either optically, using Vernier patterns, or electrically, using an automated measurement technique.

Paper Details

Date Published: 13 September 1982
PDF: 8 pages
Proc. SPIE 0334, Optical Microlithography I: Technology for the Mid-1980s, (13 September 1982); doi: 10.1117/12.933556
Show Author Affiliations
Rene Vervoordeldonk, Philips Research Laboratories (Netherlands)
Peter Willemse, Philips Research Laboratories (Netherlands)
Roel Kramer, Philips Research Laboratories (Netherlands)
Tony Cowburn, Mullard Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 0334:
Optical Microlithography I: Technology for the Mid-1980s
Harry L. Stover, Editor(s)

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