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Proceedings Paper

Pattern Recognition Automatic Fine Alignment
Author(s): D. H. Berry
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Paper Abstract

As alignment tolerances and the associated overlay characteristics become more important to microlithography, automatic alignment has proven to be necessary for high yields and consistent throughput. This paper describes an Automatic Alignment System designed for, but not limited to, projection printers. In this scheme a vidicon is used to detect the images projected from special targets on the mask and wafer. The video information is procesed by a microcomputer system that performs a pattern recognition algorithm to determine target position and the necessary alignment correction. The system closely resembles operator alignment in concept, yet gives greater accuracy and more consistent performance. Operational principles and actual performance are discussed.

Paper Details

Date Published: 13 September 1982
PDF: 7 pages
Proc. SPIE 0334, Optical Microlithography I: Technology for the Mid-1980s, (13 September 1982); doi: 10.1117/12.933554
Show Author Affiliations
D. H. Berry, The Perkin-Elmer Corporation (United States)

Published in SPIE Proceedings Vol. 0334:
Optical Microlithography I: Technology for the Mid-1980s
Harry L. Stover, Editor(s)

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