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Proceedings Paper

State Of The Art Of Acrylate Resists: An Overview Of Polymer Structure And Lithographic Performance
Author(s): Wayne M. Moreau
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Paper Abstract

The acrylate family of resists have been the most popular choice of positive resists for advanced lithography. Over the last decade, polymethylmethacrylate (PMMA) and derivatives of the general formula continue to show improved performance

Paper Details

Date Published: 30 June 1982
PDF: 6 pages
Proc. SPIE 0333, Submicron Lithography I, (30 June 1982); doi: 10.1117/12.933404
Show Author Affiliations
Wayne M. Moreau, International Business Machines Corporation (United States)


Published in SPIE Proceedings Vol. 0333:
Submicron Lithography I
Phillip D. Blais, Editor(s)

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