Proceedings PaperDiamondlike Carbon Thin Films From Ion Activated Techniques
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Diamondlike carbon thin films can be made by several different processes. We discuss two methods we have used to produce these films: deposition by low energy carbon ion beam and rf decomposition of hydrocarbon gases. In many ways, the films made by the two methods are similar, but there are some slight differences. The films have been characterized by electron spectroscopy, optical spectroscopy and transmission electron microscopy, and these measurements will be discussed. The films are mechanically hard, resist abrasion, transparent in the infrared and less so in the visible with a refractive index that can be varied between 1.8 and 2.3. Very efficient single layer quarterwave AR coatings have been produced on silicon solar cells. Other applications will be discussed.