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Proceedings Paper

Stress, Adherence, Hardness, And Density Of Optical Thin Films
Author(s): H. K. Pulker
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Paper Abstract

Results of measurements on mechanical properties of metal films (Ag, Al, Cr) and of some dielectric films (mainly MgF2, CaF2, BaF2) used in optics are presented and discussed. The obtained values showed a strong dependence on preparation conditions (residual atmosphere, deposition rate). Structural and microstructural investigations provided the data required to calculate the intrinsic tensile stress of polycrystalline MgF2 and Cr films according to a grainboundary model.

Paper Details

Date Published: 29 April 1982
PDF: 9 pages
Proc. SPIE 0325, Optical Thin Films, (29 April 1982); doi: 10.1117/12.933290
Show Author Affiliations
H. K. Pulker, Balzers AG (Liechtenstein)


Published in SPIE Proceedings Vol. 0325:
Optical Thin Films
Richard Ian Seddon, Editor(s)

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