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Proceedings Paper

Production Techniques For High Volume Sputtered Films
Author(s): Albany D. Grubb; Thomas S. Mosakowski; Walter G. Overacker
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Paper Abstract

Production techniques have been developed and proven in a production facility owned and operated by Airco Temescal in Carleton, Michigan. This plant deposits single-and multilayer films by sputtering on glass for architectural applications. Other plants have been built for handling glass substrates up to 100 inches wide to 144 inches long with average line speeds up to 12 feet per minute. This proven technology is applicable to the manufacture of other products, such as mirrors and glass with conductive coatings in large quantitites.

Paper Details

Date Published: 29 April 1982
PDF: 10 pages
Proc. SPIE 0325, Optical Thin Films, (29 April 1982); doi: 10.1117/12.933289
Show Author Affiliations
Albany D. Grubb, Airco TemescaI (United States)
Thomas S. Mosakowski, Airco TemescaI (United States)
Walter G. Overacker, Airco TemescaI (United States)


Published in SPIE Proceedings Vol. 0325:
Optical Thin Films
Richard Ian Seddon, Editor(s)

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