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Proceedings Paper

Continuous Coating Of Indium Tin Oxide Onto Large Area Flexible Substrates
Author(s): W. C. Kittler; I. T. Ritchie
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Paper Abstract

A process is described for the continuous coating of rolls of flexible material up to 36" wide with a transparent electrically conductive layer of indium tin oxide. These coatings are produced by either direct sputtering or by reactive magnetron sputtering from a metal alloy target. The latter process is preferred from a cost standpoint. Coatings are available with visible light transmittances and electrical resistances ranging from greater than 0.8 and less than 100Ω/□ to 0.9 and greater than 1MΩ/□ respectively. A variety of substrates, such as polyester, Teflon, Kapton, polycarbonate can be coated. Uses of these coatings range from use in transparent touch panels to static drains and heat mirrors. Several of these applications are discussed briefly.

Paper Details

Date Published: 29 April 1982
PDF: 4 pages
Proc. SPIE 0325, Optical Thin Films, (29 April 1982); doi: 10.1117/12.933287
Show Author Affiliations
W. C. Kittler, Sierracin/Intrex Products (United States)
I. T. Ritchie, Sierracin/Intrex Products (United States)


Published in SPIE Proceedings Vol. 0325:
Optical Thin Films
Richard Ian Seddon, Editor(s)

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