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Proceedings Paper

Activated Reactive Evaporation
Author(s): J. Ebert
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Paper Abstract

High quality optical coatings of metal oxides were prepared by Activated Reactive Evaporation (ARE). A cold cathode discharge is used for generation of low-energy oxygen ions and excited molecules. A survey of the operating parameters for the preparation of TiO2, BeO, In2O3, SnO2 and SiO2 coatings is given. Some results and problems are discussed in connection with the production of low-loss laser coatings, high power UV mirrors and conductive antireflection coatings.

Paper Details

Date Published: 29 April 1982
PDF: 11 pages
Proc. SPIE 0325, Optical Thin Films, (29 April 1982); doi: 10.1117/12.933283
Show Author Affiliations
J. Ebert, Universitat Hannover (Germany)

Published in SPIE Proceedings Vol. 0325:
Optical Thin Films
Richard Ian Seddon, Editor(s)

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