Proceedings PaperActivated Reactive Evaporation
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High quality optical coatings of metal oxides were prepared by Activated Reactive Evaporation (ARE). A cold cathode discharge is used for generation of low-energy oxygen ions and excited molecules. A survey of the operating parameters for the preparation of TiO2, BeO, In2O3, SnO2 and SiO2 coatings is given. Some results and problems are discussed in connection with the production of low-loss laser coatings, high power UV mirrors and conductive antireflection coatings.