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Proceedings Paper

Optical Properties Of Sputtered Si: H
Author(s): P. M. Martin; W. T. Pawlewicz; I. B. Mann
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Paper Abstract

Sputtered Si:H is a very promising material for use in thin-film solar cells, solar selective absorbers and optical coatings for the near infrared region. Optical property-composition relationships have been determined for Si:H coatings having wide ranges of H content and Si-H bonding. The dependence of the optical absorption edge, optical band gap and refractive index at 2 μm wavelength on H content and Si-H bonding is described. Microstructural and topographical features of the films that influence their absorption and scattering characteristics are discussed. Composition and bonding diagrams used to select deposition conditions for the desired optical properties are also presented. Finally, multilayer Si:H/Si02 all-dielectric laser mirrors with reflectances greater than 99% at 1.315, 2.7 and 3.8 μm are described to illustrate the application of these coatings.

Paper Details

Date Published: 12 April 1982
PDF: 7 pages
Proc. SPIE 0324, Optical Coatings for Energy Efficiency and Solar Applications, (12 April 1982); doi: 10.1117/12.933272
Show Author Affiliations
P. M. Martin, Pacific Northwest Laboratory (United States)
W. T. Pawlewicz, Pacific Northwest Laboratory (United States)
I. B. Mann, Pacific Northwest Laboratory (United States)


Published in SPIE Proceedings Vol. 0324:
Optical Coatings for Energy Efficiency and Solar Applications
Carl M. Lampert, Editor(s)

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