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Proceedings Paper

Integrated Optical Circuits Fabricated With Laser-Written Masks
Author(s): K. E. Wilson; C. T. Mueller; E. Garmire
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Paper Abstract

Integrated optical circuits have been fabricated using laser-written masks. Straight and curved channel waveguides have been made by ion exchange from a KNO3 melt of dimensions 10 to 30 pm in width and typically 4 to 5 cm in length. A mask made by a multiple exposure technique from a laser-written curved channel mask has been used to delineate a directional coupler in LiNbO3.

Paper Details

Date Published: 27 August 1982
PDF: 9 pages
Proc. SPIE 0321, Integrated Optics II, (27 August 1982); doi: 10.1117/12.933215
Show Author Affiliations
K. E. Wilson, University of Southern California (United States)
C. T. Mueller, University of Southern California (United States)
E. Garmire, University of Southern California (United States)

Published in SPIE Proceedings Vol. 0321:
Integrated Optics II
Dennis G. Hall, Editor(s)

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