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Proceedings Paper

Heterodyne Receiver On Silicon: An Exercise In Integration
Author(s): S. Sriram; G. B. Brandt; E. P. Supertzi
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Paper Abstract

We have designed and fabricated an integrated optical device which utilizes bulk acousto-optic modulation to introduce GHz modulation on the guided light. This device, which may be used as either a heterodyne receiver or modulator in a high frequency optical data link, is fabricated on a silicon substrate using photolithographic and etching techniques developed for semiconductor manufacture. Modulation is accomplished utilizing segmented thin film acoustic transducers. Fabrication of this device involves nearly twenty separate operations each of which must be successful in order for the device to work. We discuss these fabrication steps and their influence on the overall yield of this integrated optical device.

Paper Details

Date Published: 27 August 1982
PDF: 8 pages
Proc. SPIE 0321, Integrated Optics II, (27 August 1982); doi: 10.1117/12.933211
Show Author Affiliations
S. Sriram, Westinghouse Research and Development Center (United States)
G. B. Brandt, Westinghouse Research and Development Center (United States)
E. P. Supertzi, Westinghouse Research and Development Center (United States)

Published in SPIE Proceedings Vol. 0321:
Integrated Optics II
Dennis G. Hall, Editor(s)

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