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Proceedings Paper

Conference Summary High Resolution Soft X-Ray Optics
Author(s): A. Franks
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Paper Abstract

The main topics discussed at the Conference were multilayer mirror optics and their applications, the manufacture and metrology of X-ray optical components, and microfabrication, particularly of zone plates for X-ray microscopy. The attainment of high resolution and the full potential of multilayer mirrors will require advances to be made in manufacturing technology, metrology and in the selection of suitable substrate materials.

Paper Details

Date Published: 24 March 1982
PDF: 3 pages
Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); doi: 10.1117/12.933156
Show Author Affiliations
A. Franks, National Physical Laboratory (United Kingdom)


Published in SPIE Proceedings Vol. 0316:
High Resolution Soft X-Ray Optics
Eberhard Adolf Spiller, Editor(s)

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