Share Email Print

Proceedings Paper

Status Of The Scanning X-Ray Microscope
Author(s): B. Niemann; G. Schmahl; D. Rudolph
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Some details of the scanning X-ray microscope are described. The system is under con-struction for a resolution of 10 to 50 nm.

Paper Details

Date Published: 24 March 1982
PDF: 3 pages
Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); doi: 10.1117/12.933142
Show Author Affiliations
B. Niemann, University of Gottingen (Germany)
G. Schmahl, University of Gottingen (Germany)
D. Rudolph, University of Gottingen (Germany)

Published in SPIE Proceedings Vol. 0316:
High Resolution Soft X-Ray Optics
Eberhard Adolf Spiller, Editor(s)

© SPIE. Terms of Use
Back to Top