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Proceedings Paper

Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy
Author(s): D. Rudolph; B. Niemann; G. Schmahl
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Paper Abstract

Procedures are described to make sputtered sliced zone plates. These systems are under development for a resolution range of 10 nm ≤ d ≤ 50 nm.

Paper Details

Date Published: 24 March 1982
PDF: 3 pages
Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); doi: 10.1117/12.933141
Show Author Affiliations
D. Rudolph, University of Gottingen (Germany)
B. Niemann, University of Gottingen (Germany)
G. Schmahl, University of Gottingen (Germany)

Published in SPIE Proceedings Vol. 0316:
High Resolution Soft X-Ray Optics
Eberhard Adolf Spiller, Editor(s)

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