Share Email Print
cover

Proceedings Paper

Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy
Author(s): D. Rudolph; B. Niemann; G. Schmahl
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Procedures are described to make sputtered sliced zone plates. These systems are under development for a resolution range of 10 nm ≤ d ≤ 50 nm.

Paper Details

Date Published: 24 March 1982
PDF: 3 pages
Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); doi: 10.1117/12.933141
Show Author Affiliations
D. Rudolph, University of Gottingen (Germany)
B. Niemann, University of Gottingen (Germany)
G. Schmahl, University of Gottingen (Germany)


Published in SPIE Proceedings Vol. 0316:
High Resolution Soft X-Ray Optics
Eberhard Adolf Spiller, Editor(s)

© SPIE. Terms of Use
Back to Top