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Proceedings Paper

Design And Assembly Of A High Resolution Schwarzschild Microscope For Soft X Rays
Author(s): I. Lovas; W. Santy; E. Spiller; R. Tibbetts; J. Wilczynski
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Paper Abstract

Recently developed multilayer coatings permit use of normal incidence optics for soft x-rays promising a resolution that should be substantially better than that obtained with grazing incidence optics. We describe the design and assembly of a Schwarzschild objective for a scanning x-ray microscope. The Schwarzschild objective, consisting of two nearly concentric spherical mirrors promises diffraction-limited resolution for soft x-rays.

Paper Details

Date Published: 24 March 1982
PDF: 10 pages
Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); doi: 10.1117/12.933138
Show Author Affiliations
I. Lovas, IBM T.J. Watson Research Center (United States)
W. Santy, IBM T.J. Watson Research Center (United States)
E. Spiller, IBM T.J. Watson Research Center (United States)
R. Tibbetts, IBM T.J. Watson Research Center (United States)
J. Wilczynski, IBM T.J. Watson Research Center (United States)


Published in SPIE Proceedings Vol. 0316:
High Resolution Soft X-Ray Optics
Eberhard Adolf Spiller, Editor(s)

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