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Proceedings Paper

Diamond Machining And Mechanical Inspection Of Optical Components
Author(s): R. R. Donaldson; S. R. Patterson; D. C. Thompson
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Paper Abstract

Displacement measurement and motion control are discussed for rotary and linear axes of motion, as necessary for the dimensional measurement and diamond-tool machining of grazing incidence x-ray optics. Examples of available performance levels are drawn from measurements made on current developmental hardware, and are coupled with speculation on possible future extensions.

Paper Details

Date Published: 24 March 1982
PDF: 10 pages
Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); doi: 10.1117/12.933123
Show Author Affiliations
R. R. Donaldson, University of California (United States)
S. R. Patterson, University of California (United States)
D. C. Thompson, University of California (United States)

Published in SPIE Proceedings Vol. 0316:
High Resolution Soft X-Ray Optics
Eberhard Adolf Spiller, Editor(s)

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