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Proceedings Paper

Short Wavelength Interferometric Testing Of X-Ray Optics
Author(s): S. Mrowka; W. Harris; R. J. Speer
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Paper Abstract

Previous work has demonstrated the use of the LINNIK Point Diffraction Interferometer for the measurement of wavefront error in soft x-ray imaging systems. Operational wave-lengths from 632.8nm (He-Ne) down to 313.1nm (Hg) have been used. This paper describes our extension of the technique to 253.7nm together with a demonstration. of feasibility at 121.6 nm (Hydrogen. Lyman-α), we believe for the first time. Finally the possibility of working at soft X-Ray wavelengths is considered.

Paper Details

Date Published: 24 March 1982
PDF: 6 pages
Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); doi: 10.1117/12.933120
Show Author Affiliations
S. Mrowka, Imperial College (United Kingdom)
W. Harris, Imperial College (United Kingdom)
R. J. Speer, Imperial College (United Kingdom)


Published in SPIE Proceedings Vol. 0316:
High Resolution Soft X-Ray Optics
Eberhard Adolf Spiller, Editor(s)

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