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Proceedings Paper

Metrological Evaluation Of Grazing Incidence Mirrors
Author(s): M. Stedman
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Paper Abstract

The manufacture of grazing incidence X-ray mirrors must be accompanied by metrology at all stages of production. Traditional interferometric methods of measurement are less suited to grazing incidence optics than automated probes linked to computers. Stylus probes can be used at all stages of production, whereas non-contact optical probes are mainly useful at the final stages of polishing and figure adjustment. To characterize an X-ray mirror fully, the metrology must not only have high sensitivity, but also the ability to detect perturbations over a wide range of spatial frequencies.

Paper Details

Date Published: 24 March 1982
PDF: 7 pages
Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); doi: 10.1117/12.933117
Show Author Affiliations
M. Stedman, National Physical Laboratory (United Kingdom)


Published in SPIE Proceedings Vol. 0316:
High Resolution Soft X-Ray Optics
Eberhard Adolf Spiller, Editor(s)

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