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Proceedings Paper

Manufacture And Measurement Of Ion-Etched X-Ray Diffraction Gratings
Author(s): C. A. Wallace; G. D. Ludbrook; M. Stedman
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Paper Abstract

X-ray and EXUV diffraction gratings for synchrotron radiation are made from a ho lographically recorded master by ionetching very shallow groove profiles into the super-smooth surface of a stable silica material. Both rectangular and saw-tooth grating profiles are produced. The gratings are evaluated using optical, contacting stylus and X-ray calibration techniques.

Paper Details

Date Published: 3 May 1982
PDF: 5 pages
Proc. SPIE 0315, Reflecting Optics for Synchrotron Radiation, (3 May 1982); doi: 10.1117/12.933005
Show Author Affiliations
C. A. Wallace, Astron Developments Ltd. (United Kingdom)
G. D. Ludbrook, Astron Developments Ltd. (United Kingdom)
M. Stedman, National Physical Laboratory (United Kingdom)

Published in SPIE Proceedings Vol. 0315:
Reflecting Optics for Synchrotron Radiation
Malcolm R. Howells, Editor(s)

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