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Proceedings Paper

Progress In Extreme Ultraviolet And Soft X-Ray Multilayer Coatings
Author(s): Arno K. Hagenlocher
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Paper Abstract

The deposition of multilayer coatings for reflective filters in the extreme UV region is controlled by measuring the reflection of soft x-rays during the coating process. The x-ray source is aligned for every layer at the angle at which the maximas and minimas coincide with the peaks and valleys of the standing wave of the filter. The accuracy of the positioning between source and substrate has to be better than 1/50 degrees.

Paper Details

Date Published: 3 May 1982
PDF: 5 pages
Proc. SPIE 0315, Reflecting Optics for Synchrotron Radiation, (3 May 1982); doi: 10.1117/12.932997
Show Author Affiliations
Arno K. Hagenlocher, Acton Research Corporation (United States)


Published in SPIE Proceedings Vol. 0315:
Reflecting Optics for Synchrotron Radiation
Malcolm R. Howells, Editor(s)

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