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Proceedings Paper

Graded-Layer-Thickness Bragg X-Ray Reflectors
Author(s): D. J. Nagel; T. W. Barbee, Jr.; J. V. Gilfrich
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Paper Abstract

Multilayer x-ray reflectors which have layers that vary in thickness, either in depth or laterally along the surface, were prepared by sputtering. Alternating layers of W and C were deposited on flexible mica and smooth silicon-wafer substrates. X-ray diffraction properties of the multilayers were measured in the 1.54-8.34 A region. The mutlilayer on mica represents a dual-spacing depth-graded device. Diffraction from both the multilayer and mica was observed. A smoothly-depth-graded multilayer on silicon has a relatively-wide rocking curve which agrees well with diffraction theory. A laterally-graded multilayer on silicon has a bilayer thickness (d value) which varies linearly from 24.8 to 29.2 A in 6 cm.

Paper Details

Date Published: 3 May 1982
PDF: 8 pages
Proc. SPIE 0315, Reflecting Optics for Synchrotron Radiation, (3 May 1982); doi: 10.1117/12.932996
Show Author Affiliations
D. J. Nagel, Naval Research Laboratory (United States)
T. W. Barbee, Jr., Stanford University (United States)
J. V. Gilfrich, Naval Research Laboratory (United States)

Published in SPIE Proceedings Vol. 0315:
Reflecting Optics for Synchrotron Radiation
Malcolm R. Howells, Editor(s)

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