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Proceedings Paper

Precision Wafer Stepper Utilizing A Two-Dimensional Optical Encoder
Author(s): Jim Dey
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Paper Abstract

This paper describes a two-dimensional optical encoder that is used to control the x-y stepping stage of a modern state-of-the-art wafer stepper. Stage location is determined by measuring the position of a quartz grid plate that is attached to the stage. Accuracy and resolution of measurement are maintained by varying the null position of the grid. Operational principles and actual performance are discussed.

Paper Details

Date Published: 28 July 1981
PDF: 6 pages
Proc. SPIE 0275, Semiconductor Microlithography VI, (28 July 1981); doi: 10.1117/12.931870
Show Author Affiliations
Jim Dey, Optimetrix Corporation (United States)


Published in SPIE Proceedings Vol. 0275:
Semiconductor Microlithography VI
James W. Dey, Editor(s)

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