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Proceedings Paper

A New High Precision Differential Spectrometer: Construction, Characteristics, And Capabilities
Author(s): R. B. Stephens; G. K. Sorensen
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Paper Abstract

A unique differential spectrometer has been developed for the quantitative examination of surfaces. It combines a tuneable pulsed dye laser light source, a flexible precision sample holder, silicon photodiode-in-integrating sphere detectors, and a desktop computer controller/analyzer. This combination enables very precise measurements--twiddlel% systematic errors and twiddle.02% random errors in reflection and transmission measurements. The spectrome-ter has been applied to the investigation of the structure of various component films used in semiconductor devices and in a basic study of the molecular-molecular interactions of dyes adsorbed on surfaces. With only minor modifications, this device can make transient spectroscopy measurements with a resolution of twiddle 10 nsec. It can also be used for a variety of modulation spectroscopies. We will be exploring those areas in the future.

Paper Details

Date Published: 30 April 1981
PDF: 8 pages
Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); doi: 10.1117/12.931712
Show Author Affiliations
R. B. Stephens, Exxon Research and Engineering Company (United States)
G. K. Sorensen, Exxon Research and Engineering Company (United States)


Published in SPIE Proceedings Vol. 0276:
Optical Characterization Techniques for Semiconductor Technology
David E. Aspnes; Roy F. Potter; Samuel S. So, Editor(s)

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