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Proceedings Paper

Microstructural Information From Optical Properties In Semiconductor Technology
Author(s): D. E. Aspnes
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Paper Abstract

The optical properties of a material in the near-ir--near-uv spectral range are predominantly determined by electronic polarizabilities. The electronic polarizabilities are determined in turn by composition, local order, and long-range order. We discuss methods developed to parametrize the information contained in optical properties of micro-scopically heterogeneous systems, and to obtain the values of these parameters. These methods are based on accurate bulk dielectric function values of constituents, effective medium theory, and linear regression analysis. Recent theories that establish limits on allowed values of the dielectric response of two-component systems, regardless of their microstructure, provide an indication of the reliability of these parameters.

Paper Details

Date Published: 30 April 1981
PDF: 8 pages
Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); doi: 10.1117/12.931705
Show Author Affiliations
D. E. Aspnes, Bell Laboratories (United States)


Published in SPIE Proceedings Vol. 0276:
Optical Characterization Techniques for Semiconductor Technology
David E. Aspnes; Roy F. Potter; Samuel S. So, Editor(s)

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