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Proceedings Paper

Ellipsometric Configurations And Techniques
Author(s): R. M. A. Azzam
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Paper Abstract

Classical and new ellipsometric configurations and techniques are briefly reviewed. This includes null and photometric ellipsometry; azimumetry (ellipsometry based on azimuth measurements alone); film-substrate ellipsometry based upon detection of special values of ψ and Δ at certain angles of incidence; surface-modulated ellipsometry and AIDER (angle-of-incidence derivative ellipsometry and reflectometry).

Paper Details

Date Published: 30 April 1981
PDF: 8 pages
Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); doi: 10.1117/12.931704
Show Author Affiliations
R. M. A. Azzam, University of New Orleans (United States)


Published in SPIE Proceedings Vol. 0276:
Optical Characterization Techniques for Semiconductor Technology
David E. Aspnes; Roy F. Potter; Samuel S. So, Editor(s)

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