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Proceedings Paper

Direct Determination Of The Far-Infrared Optical Constants Of A Solid
Author(s): D. G. Mead
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Paper Abstract

In this paper is described the principles of an asymmetric Michelson interferometer for use in the far infrared region of the electromagnetic spectrum, for the direct determination of the optical constants of a solid. Further, an apparatus for realizing the determination of the optical properties is described, and the method and some recent developments are included. The instrument is useful for the material characterization of semiconductors and some examples are given.

Paper Details

Date Published: 30 April 1981
PDF: 7 pages
Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); doi: 10.1117/12.931696
Show Author Affiliations
D. G. Mead, Nicolet Instrument Corporation (United States)


Published in SPIE Proceedings Vol. 0276:
Optical Characterization Techniques for Semiconductor Technology
David E. Aspnes; Roy F. Potter; Samuel S. So, Editor(s)

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