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Proceedings Paper

Infrared Transmission Characterization Of P-Type Gallium Arsenide
Author(s): W. J. Moore
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Paper Abstract

The capabilities and limitations of infrared transmission as a characterization tool for p-type gallium-arsenide are being studied. Absorption spectra resulting from impurity ground state to excited state transitions have been analyzed to yield impurity activation energy and absorption cross section. These data allow determination of impurity type and concentration. Sensitivities achieved with copper, manganese, and magnesium are discussed.

Paper Details

Date Published: 30 April 1981
PDF: 3 pages
Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); doi: 10.1117/12.931693
Show Author Affiliations
W. J. Moore, Naval Research Laboratory (United States)


Published in SPIE Proceedings Vol. 0276:
Optical Characterization Techniques for Semiconductor Technology
David E. Aspnes; Roy F. Potter; Samuel S. So, Editor(s)

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