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Proceedings Paper

Multilayer Laue lenses fabrication by reactive ion etching in combination with focused ion beam
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Paper Details

Date Published:
Proc. SPIE 8502, Advances in X-Ray/EUV Optics and Components VII, 850203; doi: 10.1117/12.930917
Show Author Affiliations
Nathalie Bouet, Brookhaven National Lab. (United States)
Raymond Conley, Brookhaven National Lab. (United States)
Ralu Divan, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 8502:
Advances in X-Ray/EUV Optics and Components VII
Shunji Goto; Christian Morawe; Ali M. Khounsary, Editor(s)

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