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Proceedings Paper

Development of surface profile measurement method for ellipsoidal x-ray mirrors using phase retrieval
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Paper Abstract

An ellipsoidal mirror is a promising type of X-ray mirror, because it can focus X-rays to nanometer size with a very large aperture and no chromatic aberration. However, ideal ellipsoidal mirrors have not yet been realized by any manufacturing method. This is partly because there is no evaluation method for its surface figure profile. In this paper, we propose and develop a method for measuring surface figure profile of ellipsoidal mirrors using phase retrieval. An optical design for soft X-ray focusing, the employed phase retrieval method and an experimental optical system specialized for wavefront measurement using a He-Ne laser are reported.

Paper Details

Date Published: 19 October 2012
PDF: 8 pages
Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 850103 (19 October 2012); doi: 10.1117/12.930340
Show Author Affiliations
Takahiro Saitou, The Univ. of Tokyo (Japan)
Yoshinori Takei, The Univ. of Tokyo (Japan)
Hidekazu Mimura, The Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 8501:
Advances in Metrology for X-Ray and EUV Optics IV
Lahsen Assoufid; Peter Z. Takacs; Anand Krishna Asundi, Editor(s)

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