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Proceedings Paper

Fast multiphoton microfabrication of freeform polymer microstructures by spatiotemporal focusing and patterned generation
Author(s): Y.-C. Li; L.-C. Cheng; C.-H. Lien; C.-Y. Chang; W.-C. Yen; S.-J. Chen
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Paper Abstract

One of the limits of a conventional multiphoton microfabrication is its low throughput due to the sequential nature of scanning process. In this study, a multiphoton microfabrication system based on spatiotemporal focusing and patterned excitation has been developed to provide freeform polymer microstructures fast. The system integrates a 10 kHz repetition rate ultrafast amplifier featuring strong instantanrror device generating designed patterns at the focal plane. As the result, three-dimensional freeform polymer microstructures using Rose Bengal as the photoinitiator are created by sequentially stacking up two-dimensional (2D) structures layer-by-layer. The size of each 2D fabrication area can be larger than 100 × 100 μm2. Compared with scanning process or fixed mask pattern generation, this approach provides two- or three-fold fabrication speed and freeform microstructures. Furthermore, the system is capable of optical sectioning the fabricated microstructures for providing 3D inspection.

Paper Details

Date Published: 19 October 2012
PDF: 8 pages
Proc. SPIE 8489, Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II, 848905 (19 October 2012); doi: 10.1117/12.930307
Show Author Affiliations
Y.-C. Li, National Cheng Kung Univ. (Taiwan)
L.-C. Cheng, National Cheng Kung Univ. (Taiwan)
C.-H. Lien, National Cheng Kung Univ. (Taiwan)
C.-Y. Chang, National Cheng Kung Univ. (Taiwan)
W.-C. Yen, Chung-Shan Institute of Science Technology (Taiwan)
S.-J. Chen, National Cheng Kung Univ. (Taiwan)


Published in SPIE Proceedings Vol. 8489:
Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II
David H. Krevor; William S. Beich; Michael P. Schaub; Stefan M. Bäumer, Editor(s)

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